Calcium Evaporation System

1. Substrate size : 100mm±0.05mmX100mm±0.05mm
2. Loading capacity : Glass 1EA  
3. Chamber type : Square & Vertical
4. Hi-vac. pump : TMP
5. Low-vac. pump : Rotary pump
6. Process Pressure : ≤ 5.0×E-6 torr/min (2시간이내)
7. Deposition Uniformity: ±3%