* Stage
  - Substrate size : Up to 8" round
  - Chuck : 150 x 150 square
  - Movement : X ± 13 mm, Y ± 13 mm, Z 5 mm, Theta 5 degrees
  - Alignment accuracy : 1 um
  - Mechanical resolution : 0.1 um
  - Leveling Z-motion motorizing & air pressure sensor
  - Vibration protection mounted on anti-vibration table 

* Mask Holder
  - Mask holding type : Vacuum * clip
  - Proximity gap : Gap ball type for negative PR
  - Gap control : 1 um
  - Gap ball : 2 mm sapphire ball
  - Mask holder : 7"x 7" mask holder 

* UV Source
  - UV lamp : 500 W or 1 kW, Fixed light source(70 ~ 100%)
  - Uniform beam size : 8.25" X 8.25" T
  - Exposure mode : Pressure / Vacuum / Proximity
  - Exposure time control programmable
  - Exposure timer : 1 ~ 3,500 sec 

* Microscope
  - Type : Dual scope & CCD camera
  - Monitor : 17" LCD monitor
  - Video mode : Single and split field
  - Magnification : 35x ~ 400x
  - Objective spacing : 50 mm ~ 200 mm
  - Zoom6000 : 0.7x ~ 4.5x
  - CCD Camera : 1/3" CCD 

* Control System
  - Controller : PLC & PC controller
  - Software : MDA visual software